Sample number
Power (W)
Pressure (mTorr)
Gas type
Operation time (min)
(a)
180
100
Ar
7.5
(b)
180
50
Ar
7.5
(c)
100
100
Ar
7.5
(d)
100
100
He
7.5
(e)
100
100
Ar
15
(f)
180
50
Ar
15
Table 2:
Plasma parameters of the PTFE coatıng process.