Short Communication, Res J Opt Photonics Vol: 7 Issue: 1
Femtosecond Laser Machining: A Versatile Tool for Microfabrication
Hanlian You*
1Department of Materials Science and Engineering, Northeastern University, Liaoning, China
*Corresponding Author: Hanlian You
Department of Materials Science and
Engineering, Northeastern University, Liaoning, China
E-mail: hanli@dme.neu.edu.cn
Received date: 03 February, 2023, Manuscript No. RJOP-23-93269;
Editor assigned date: 07 February, 2023, PreQC No. RJOP-23-93269 (PQ);
Reviewed date: 21 February, 2023, QC No. RJOP-23-93269;
Revised date: 28 February, 2023, Manuscript No. RJOP-23-93269 (R);
Published date: 07 March, 2023, DOI: 10.4172/RJOP.1000041
Citation: You H (2023) Femtosecond Laser Machining: A Versatile Tool for Microfabrication. Res J Opt Photonics 7:1.
Description
Femtosecond laser machining is a highly precise and versatile tool for microfabrication that has gained significant interest in recent years. The technology employs ultra-short laser pulses with durations in the femtosecond range (10^-15 seconds) to machine a wide range of materials at the micro and nano scales. The high precision and accuracy of femtosecond lasers make them ideal for microfabrication applications, including microfluidics, micromachining and nanofabrication.
Femtosecond lasers use a process known as multiphoton absorption to remove material from the surface of a material. During this process, multiple photons are absorbed by the material, causing the electrons to transition to higher energy levels, leading to ionization and material removal. The precision of the process results from the ability to control the energy, intensity and duration of the laser pulses, allowing for high precision and accuracy [1].
Principles of femtosecond laser machining
The principles of femtosecond laser machining are based on the interaction between ultrashort laser pulses and the material being machined [2]. There are three main mechanisms involved in femtosecond laser machining: multiphoton absorption, non-linear absorption and optical breakdown [3].
Multiphoton absorption
Multiphoton absorption is a process that occurs when multiple photons are absorbed by a material, leading to the ionization of the material and removal of the material from the surface. This process only occurs when the intensity of the laser beam is high enough, and the duration of the pulse is in the femtosecond range. Multiphoton absorption allows for high precision and accuracy in the removal of material, making it ideal for microfabrication applications [4].
Non-linear absorption
Non-linear absorption is another mechanism involved in femtosecond laser machining. It occurs when the intensity of the laser beam is high enough to cause the electrons in the material to be excited to higher energy levels, leading to ionization and material removal. The intensity of the laser beam is controlled to ensure that non-linear absorption occurs only at the surface of the material being machined [5].
Optical breakdown
Optical breakdown occurs when the intensity of the laser beam is high enough to cause the material to undergo a phase change, leading to the creation of plasma. This process is responsible for the formation of micro and nanostructures in the material being machined. The duration of the laser pulse and the intensity of the laser beam are carefully controlled to ensure that the plasma created is confined to the surface of the material, allowing for precise material removal [6].
Advantages of femtosecond laser machining
The benefits of femtosecond laser machining include:
High precision: Femtosecond laser pulses can create highly precise patterns on a variety of materials, with feature sizes down to the nanometer scale.
Minimal heat affected zone: Unlike other laser machining techniques, femtosecond laser machining causes minimal thermal damage to the surrounding material, making it ideal for creating highly precise and complex patterns on delicate materials [7].
Versatility: Femtosecond laser machining can be used on a wide range of materials, including metals, polymers, ceramics and semiconductors.'
Non-contact: Femtosecond laser machining is a non-contact technique, which means that there is no physical contact between the laser and the material being machined. This makes it ideal for creating patterns on delicate or sensitive materials [8].
Applications of femtosecond laser machining
Microelectronics: Femtosecond laser machining can be used to create precise and intricate patterns on semiconductors, which are used in microelectronics and photonics.
Biomedical engineering: Femtosecond laser machining can be used to create precise patterns on biological tissues, which can be used for tissue engineering, drug delivery and medical implants.
Microfluidics: Femtosecond laser machining can be used to create microchannels and other structures on polymers and other materials, which can be used in microfluidics and lab-on-a-chip devices [9].
MEMS/NEMS: Femtosecond laser machining can be used to create precise patterns on Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) devices, which are used in sensors, actuators and other microelectronic devices [10].
Conclusion
Femtosecond laser machining is a powerful tool for microfabrication that offers high precision, minimal heat affected zone, versatility and non-contact machining. Its applications span a wide range of fields, including microelectronics, biomedical engineering, microfluidics and MEMS/NEMS.
References
- Sugioka K, Cheng Y (2014) Femtosecond laser three-dimensional micro- and nanofabrication. Appl Phys Rev 1:10.1063/1.4904320.
- Gu M (2017) Advanced optical imaging theory. Springer.
- Maruo S, Fourkas JT (2008) Recent progress in multiphoton microfabrication. Mater Today 11:38-45.
- Keldysh LV (1965) Ionization in the field of a strong electromagnetic wave. Sov Phys JETP 20:1307-1314.
- Oane M, Mahmood MA, Popescu AC (2021) A state-of-the-art review on integral transform technique in laser-material interaction: Fourier and non-fourier heat equations. Materials (Basel) 14:4733.
- Farson DF, Choi HW, Zimmerman B, Steach JK, Chalmers JJ, et al. (2008) Femtosecond laser micromachining of dielectric materials for biomedical applications. J Micromech Microeng 18.
- Wang D, Wei S, Yuan X, Liu Z, Weng Y, et al. (2022) Ultrafast imaging for uncovering laser–material interaction dynamics. IJMSD 2:65-81.
- Antanavičiūtė I, Šimatonis L, Ulčinas O, Gadeikytė A, Abakevičienė B, et al. (2018) Femtosecond laser micro‐machined polyimide films for cell scaffold applications. J Tissue Eng Regen Med 12:e760-e773.
- Birnbaum M (1965) Semiconductor surface damage produced by ruby lasers. J Appl Phys 36:3688-3689.
- Pique A, Chrisey DB (2002) Direct-write technologies for rapid prototyping applications: sensors, electronics, and integrated devices.
