Nanolithography is the branch of nanotechnology concerned with the study and application of fabricating nanometer-scale structures and art of etching, writing, or printing at the microscopic level. The dimensions of characters are on the order of nanometers. Instruments used in nanolithography include the scanning probe microscope (SPM) and the atomic force microscope (ATM). The SPM allows surface viewing in fine detail without necessarily modifying it. Either the SPM or the ATM can be used to etch, write, or print on a surface in single-atom dimensions. Nanolithography is used e.g. during the nano‐fabrication of leading-edge semiconductor integrated circuits (nanocircuitry), for nanoelec‐tromechanical systems (NEMS) or for almost any other fundamental application across various scientific disciplines in nanoresearch. This technology can be suitable to use in nanofabrication of various semiconducting Integrated Circuits (ICs), NEMS and for various applications in research.