Journal of Nuclear Energy Science & Power Generation TechnologyISSN: 2325-9809

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Hikmat A Hamad Author

hikmat.hamad@adu.ac.ae

Subjects of specialization
Sputtering

Affiliation
Department of Applied Sciences, College of Arts and Science, University of Abu Dhabi, UAE

Biography

Hikmat A Hamad  is working in the Department of Applied Sciences, College of Arts and Science, University of Abu Dhabi, UAE,Operational Characteristics of a Low Energy Sputtering Ion Source

Publications

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Operational Characteristics of a Low Energy Sputtering Ion Source

Author(s):

Hikmat A Hamad, Nibras F Ali and Haitham M Farok

Operational Characteristics of a Low Energy Sputtering Ion Source

In this work a modified Freeman Ion source, used for ion sputtering, is designed and constructed. The choice of this ion source was based on its remarkable success in the semiconductor industry employing ion implantation techniques. A detailed technical description of the design and the fabrication of the ion source are given. Thermionic emission current measurements were performed and the discharge characteristics of the... view more»

DOI: 10.4172/2325-9809.1000131

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