AG Helal Author
Subjects of specialization
Affiliation
Ion Beam Processing
Accelerators & Ion Sources Department, Basic Nuclear Science Division, Nuclear Research Center, Atomic Energy Authority, Cairo, Egypt
AG Helal is working in the Accelerators & Ion Sources Department, Basic Nuclear Science Division, Nuclear Research Center, Atomic Energy Authority, Cairo, Egypt, Study of Ion Beam Processing Using Different Materials
Research Article Subscription
Author(s): AG Helal, H El-Khabeary, SI Radwan
Study of Ion Beam Processing Using Different Materials
Simulation of ion beam processing in different target materials using different noble gases was studied. The Simulation was conducted using singly charged neon, argon and krypton ions at different energies greater than 3keV and up to 10keV. The open source computer code SRIM 3D was used in the simulation to determine the ion beam penetrability into the target material, as well as the range dependence on the beam’s energy. The effect of target material atomic number on the ion penetration range was studied. The distribution of the range and the trajectory of the ions in the target material were determined. The spu... view moreĀ»